TY - JOUR
T1 - Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas
AU - Amano, Reiho
AU - Dinh, Thang Hung
AU - Sasanuma, Atsushi
AU - Arai, Goki
AU - Hara, Hiroyuki
AU - Fujii, Yusuke
AU - Hatano, Tadashi
AU - Ejima, Takeo
AU - Jiang, Weihua
AU - Sunahara, Atsushi
AU - Takahashi, Akihiko
AU - Nakamura, Daisuke
AU - Okada, Tatsuo
AU - Sakaue, Kazuyuki
AU - Miura, Taisuke
AU - O'Sullivan, Gerry
AU - Higashiguchi, Takeshi
PY - 2018/7/1
Y1 - 2018/7/1
N2 - We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.
AB - We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.
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U2 - 10.7567/JJAP.57.070311
DO - 10.7567/JJAP.57.070311
M3 - Article
AN - SCOPUS:85049383387
SN - 0021-4922
VL - 57
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 7
M1 - 070311
ER -