Integrated micro chamber for living cell analysis with negligible dead volume sample injector

M. Kanai, H. Abe, T. Munaka, Y. Fujiyama, D. Uchida, A. Yamayoshi, H. Nakanishi, A. Murakami, S. Shoji

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

We develop the micro chamber for real-time monitoring of living cell. It is integrated with an extremely low dead volume sample injector. The chamber was fabricated by the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE. The reproducible sample injection of the order of 1 nL is performed. Biological cell culture of HeLa is also demonstrated in a prototype device.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページ288-291
ページ数4
ISBN(電子版)0780377311, 9780780377318
DOI
出版ステータスPublished - 2003
外部発表はい
イベント12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
継続期間: 2003 6月 82003 6月 12

出版物シリーズ

名前TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
国/地域United States
CityBoston
Period03/6/803/6/12

ASJC Scopus subject areas

  • 電子工学および電気工学

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