LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING.

Hiroshi Tanino^*, Koichiro Hoh, Masahiro Hirata, Shingo Ichimura, Nobufumi Atoda, Takio Tomimasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

^*この研究の対応する著者

研究成果: Article › 査読