Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE

S. Honda; Z. Wu; J. Matsui; K. Utaka; T. Edura; M. Tokuda; K. Tsutsui; Y. Wada

doi:10.1049/el:20070884

Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE

S. Honda^*, Z. Wu, J. Matsui, K. Utaka, T. Edura, M. Tokuda, K. Tsutsui, Y. Wada

^*この研究の対応する著者

基幹理工学部

研究成果: Article › 査読

34 被引用数 (Scopus)

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A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.

本文言語	English
ページ（範囲）	630-631
ページ数	2
ジャーナル	Electronics Letters
巻	43
号	11
DOI	https://doi.org/10.1049/el:20070884
出版ステータス	Published - 2007 5月 28

ASJC Scopus subject areas

電子工学および電気工学

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10.1049/el:20070884

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AU - Honda, S.

AU - Wu, Z.

AU - Matsui, J.

AU - Utaka, K.

AU - Edura, T.

AU - Tokuda, M.

AU - Tsutsui, K.

AU - Wada, Y.

PY - 2007/5/28

Y1 - 2007/5/28

N2 - A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.

AB - A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.

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JO - Electronics Letters

JF - Electronics Letters

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Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE

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