Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

研究成果: Article › 査読

本文言語	English
ページ（範囲）	765
ページ数	1
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	22pt1
号	4
DOI	https://doi.org/10.1143/jjap.22.765
出版ステータス	Published - 1983
外部発表	はい

ASJC Scopus subject areas

@article{9b7e8f20390f42ceb9269a2ed67d18e4,

title = "Lithography Experiments using Synchrotron Radiation from ETL Storage Ring",

author = "Koichiro Hoh and Masahiro Hirata and Nobufumi Atoda and Hiroshi Tanino and Shingo Ichimura and Hideo Onuki",

year = "1983",

doi = "10.1143/jjap.22.765",

language = "English",

volume = "22pt1",

pages = "765",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "4",

}

TY - JOUR

T1 - Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

AU - Hoh, Koichiro

AU - Hirata, Masahiro

AU - Atoda, Nobufumi

AU - Tanino, Hiroshi

AU - Ichimura, Shingo

AU - Onuki, Hideo

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=85024276754&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85024276754&partnerID=8YFLogxK

U2 - 10.1143/jjap.22.765

DO - 10.1143/jjap.22.765

M3 - Article

AN - SCOPUS:85024276754

SN - 0021-4922

VL - 22pt1

SP - 765

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 4

ER -