In this paper, we demonstrate the micro heater device integrated with a micro chamber for investigation on cell-cell interactions under local thermal stimulation. The temperature distribution in the micro chamber was confirmed by on-chip temperature sensors and finite element method simulation. We successfully stimulated NIH-3T3 cells by Joule heating through the micro heater and observed localized expression of heat shock proteins (HSPs) after cells were cultured in the micro chamber confluently. The temperature distribution and the localized expression area consisted. Thus, the thermal stimulation area was confined in the micro chamber. Besides, localized expression of HSPs was observed in a cell monolayer. This device will be widely applied for the study on cell-cell interactions under local stimulation.