Low-temperature Au-Au bonding using nanoporous Au-Ag sheets

Hayata Mimatsu, Jun Mizuno, Takashi Kasahara, Mikiko Saito, Hiroshi Nishikawa, Shuichi Shoji

研究成果: Article査読

6 被引用数 (Scopus)

抄録

In this study, we proposed low-temperature Au-Au bonding using nanoporous Au-Ag sheets, fabricated by dealloying a Au-Ag sheet in HNO3 solution, as a joint layer. The influence of the annealing temperature on the pore structure and chemical properties of the sheets was investigated. The chemical composition of the sheet was analyzed by X-ray photoelectron spectroscopy (XPS). It was found that the strength of Au-Au bonding with the nanoporous sheet increased. A sheet treated with liquid N2 was also tested; the strength of the Au-Au bond increased as a result of this low-temperature treatment.

本文言語English
論文番号050204
ジャーナルJapanese journal of applied physics
52
5 PART 1
DOI
出版ステータスPublished - 2013 5月
外部発表はい

ASJC Scopus subject areas

  • 工学一般
  • 物理学および天文学一般

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