Low temperature synthesis of extremely dense and vertically aligned single-walled carbon nanotubes

Guofang Zhong; Takayuki Iwasaki; Kotaro Honda; Yukio Furukawa; Iwao Ohdomari; Hiroshi Kawarada

doi:10.1143/JJAP.44.1558

Low temperature synthesis of extremely dense and vertically aligned single-walled carbon nanotubes

Guofang Zhong^*, Takayuki Iwasaki, Kotaro Honda, Yukio Furukawa, Iwao Ohdomari, Hiroshi Kawarada

^*この研究の対応する著者

研究成果: Article › 査読

136 被引用数 (Scopus)

抄録

A novel point-arc microwave plasma chemical vapor deposition (CVD) apparatus was employed to grow single-walled carbon nanotubes (SWNTs) on Si substrates coated with a sandwich-like nano-layer structure of 0.7 nm Al ₂O₃ (top)/0.5nm Fe/ 5-70 nm Al₂O₃ by conventional high frequency sputtering. The growth of extremely dense and vertically aligned SWNTs with an almost constant growth rate of 270 μm/h within 40 min at a temperature as low as 600°C was demonstrated for the first time. The volume density of the as-grown SWNT films is as higher as 66kg/m³.

本文言語	English
ページ（範囲）	1558-1561
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	44
号	4 A
DOI	https://doi.org/10.1143/JJAP.44.1558
出版ステータス	Published - 2005 4月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/JJAP.44.1558

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abstract = "A novel point-arc microwave plasma chemical vapor deposition (CVD) apparatus was employed to grow single-walled carbon nanotubes (SWNTs) on Si substrates coated with a sandwich-like nano-layer structure of 0.7 nm Al 2O3 (top)/0.5nm Fe/ 5-70 nm Al2O3 by conventional high frequency sputtering. The growth of extremely dense and vertically aligned SWNTs with an almost constant growth rate of 270 μm/h within 40 min at a temperature as low as 600°C was demonstrated for the first time. The volume density of the as-grown SWNT films is as higher as 66kg/m3.",

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AU - Iwasaki, Takayuki

AU - Honda, Kotaro

AU - Furukawa, Yukio

AU - Ohdomari, Iwao

AU - Kawarada, Hiroshi

PY - 2005/4

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KW - Catalyst

KW - Chemical vapor deposition

KW - Low-temperature deposition

KW - Point-arc microwave plasma

KW - Single-walled carbon nanotubes

KW - Vertical alignment

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Low temperature synthesis of extremely dense and vertically aligned single-walled carbon nanotubes

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