Micro electrostatic driving mechanisms utilizing slanted-fiber sheet and slanted-plates

This paper proposed new micro electrostatic driving mechanisms utilizing anisotropic feature of friction. One of the driving mechanisms consisted of parallel plate electrodes and a slanted-fiber sheet between the electrodes. When AC voltage was applied between the electrodes, alternative electrostatic force caused linear motion of the mechanism due to anisotropic feature of the friction between fibers and the lower electrode. The achieved velocity was about 10 mm/s in reverse of the fiber-slanted direction, and it roughly agreed with the numerical calculation based on a lamped dynamic model. Another mechanism was proposed because it was difficult to control friction coefficient and critical frequency of driving mechanism by the slanted-fiber sheet. It consisted of parallel plate electrodes and two slanted-plates made of polyester between the electrodes. The achieved velocity was about 5 mm/s. However, the driving direction of slanted-plate mover was opposite of the direction of slanted-fiber mover. Based on this experimental fact, relationship between the driving direction and the friction coefficient was investigated. We also proposed a rotational driving mechanism and a linear driving mover without a lead to provide voltage to the mover.