Micro liquid prism

Y. Yoshihata; A. Takei; N. Binh Khiem; T. Kan; E. Iwase

doi:10.1109/MEMSYS.2009.4805546

Micro liquid prism

Y. Yoshihata^*, A. Takei, N. Binh Khiem, T. Kan, E. Iwase

^*この研究の対応する著者

研究成果: Conference article › 査読

8 被引用数 (Scopus)

抄録

This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm³ was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.

本文言語	English
論文番号	4805546
ページ（範囲）	967-970
ページ数	4
ジャーナル	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI	https://doi.org/10.1109/MEMSYS.2009.4805546
出版ステータス	Published - 2009 6月 1
外部発表	はい
イベント	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy 継続期間: 2009 1月 25 → 2009 1月 29

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

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title = "Micro liquid prism",

abstract = "This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.",

author = "Y. Yoshihata and A. Takei and Khiem, {N. Binh} and T. Kan and E. Iwase",

year = "2009",

month = jun,

day = "1",

doi = "10.1109/MEMSYS.2009.4805546",

language = "English",

pages = "967--970",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

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TY - JOUR

T1 - Micro liquid prism

AU - Yoshihata, Y.

AU - Takei, A.

AU - Khiem, N. Binh

AU - Kan, T.

AU - Iwase, E.

PY - 2009/6/1

Y1 - 2009/6/1

N2 - This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.

AB - This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.

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DO - 10.1109/MEMSYS.2009.4805546

M3 - Conference article

AN - SCOPUS:65949095422

SN - 1084-6999

SP - 967

EP - 970

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

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Micro liquid prism

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