TY - GEN
T1 - Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems
AU - Shoji, Shuichi
N1 - Publisher Copyright:
© 1999 Japan Soc. Of Applied Physics.
PY - 1999
Y1 - 1999
N2 - Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.
AB - Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.
UR - http://www.scopus.com/inward/record.url?scp=84886818906&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84886818906&partnerID=8YFLogxK
U2 - 10.1109/IMNC.1999.797482
DO - 10.1109/IMNC.1999.797482
M3 - Conference contribution
AN - SCOPUS:84886818906
T3 - 1999 International Microprocesses and Nanotechnology Conference
SP - 72
EP - 73
BT - 1999 International Microprocesses and Nanotechnology Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1999 International Microprocesses and Nanotechnology Conference
Y2 - 6 July 1999 through 8 July 1999
ER -