抄録
Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
| 本文言語 | English |
|---|---|
| 論文番号 | 001 |
| ページ（範囲） | 157-171 |
| ページ数 | 15 |
| ジャーナル | Journal of Micromechanics and Microengineering |
| 巻 | 4 |
| 号 | 4 |
| DOI | |
| 出版ステータス | Published - 1994 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 材料力学
- 機械工学
- 電子工学および電気工学