Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji; Shigeru Nakagawa; Masayoshi Esashi

doi:10.1016/0924-4247(90)85036-4

Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji^*, Shigeru Nakagawa, Masayoshi Esashi

^*この研究の対応する著者

研究成果: Article › 査読

140 被引用数 (Scopus)

抄録

A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH₂O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

本文言語	English
ページ（範囲）	189-192
ページ数	4
ジャーナル	Sensors and Actuators: A. Physical
巻	21
号	1-3
DOI	https://doi.org/10.1016/0924-4247(90)85036-4
出版ステータス	Published - 1990 2月
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
器械工学
凝縮系物理学
表面、皮膜および薄膜
金属および合金
電子工学および電気工学

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abstract = "A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.",

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AU - Nakagawa, Shigeru

AU - Esashi, Masayoshi

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N2 - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

AB - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

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Micropump and sample-injector for integrated chemical analyzing systems

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