Perpendicularly anisotropic L 10 -ordered FePt-SiO2 granular films with an average grain size of 15 nm and a relatively narrow size distribution were prepared by cosputtering Fe, Pt, and SiO2 on MgO (001) substrates at 700 °C. By reducing the substrate temperature to 500 °C, the average grain size was further refined to 6.2 nm with a standard deviation of 1.7 nm; however, the FePt particles remained as an A1 disordered phase. Alloying Ag to the FePt particles and increasing the Ar gas pressure in the sputtering chamber were found to be both beneficial for enhancing the L 10 ordering while keeping the fine granular structure.
|ジャーナル||Journal of Applied Physics|
|出版ステータス||Published - 2008|
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