We have studied the multiple scattering of He+, Ne+, and Ar+ from a TaC(001) surface in the energy region of the order of 1 keV. The experimental data revealed large differences between the energy spectra of these ions. The spectral peak corresponding to quasi-double scattering is clearly observed for Ar+ but not observed for Ne+. The multiple scattering effect appearing in the energy spectra of rare-gas ions is discussed on the basis of electron exchange between these ions and solid surfaces.
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