TY - GEN
T1 - Nanostructural evolution in non-epitaxial growth of thin films
AU - Hu, Minghui
AU - Noda, Suguru
AU - Komiyama, Hiroshi
PY - 2006
Y1 - 2006
N2 - The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the theoretical investigation of thin film growth of metals on TiO2, and the experimental study of Cu and Cr thin film growth on SiO2. This study provides fundamental understanding of nanostructural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.
AB - The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the theoretical investigation of thin film growth of metals on TiO2, and the experimental study of Cu and Cr thin film growth on SiO2. This study provides fundamental understanding of nanostructural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.
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U2 - 10.1557/proc-0961-o05-04
DO - 10.1557/proc-0961-o05-04
M3 - Conference contribution
AN - SCOPUS:40949108035
SN - 9781604234138
T3 - Materials Research Society Symposium Proceedings
SP - 26
EP - 31
BT - Nanostructured and Patterned Materials for Information Storage
PB - Materials Research Society
T2 - 2006 MRS Fall Meeting
Y2 - 27 November 2006 through 30 November 2006
ER -