TY - JOUR
T1 - New ion counting system for laser sputtered neutral mass spectrometry
AU - Ichimura, S.
AU - Shimizu, H.
AU - Kokuban, K.
AU - Hashizume, H.
AU - Goto, K.
PY - 1990
Y1 - 1990
N2 - In sputtered neutrals mass spectrometry (SNMS) with a laser for post-ionization a bunch of ions is generated within a short period corresponding to a laser pulse width (typically, a few tens of nanoseconds). The number of ions exceeds 100 under some conditions, so that a peak counting ability close to 1010 is necessary to detect all of them. The authors used an analog detection system for this purpose, but it was found to suffer from signal fluctuation, particularly when the primary ion beam current was low. They therefore developed a new counting system in which a bunch of ions incident on a microchannel plate is converted into photoradiating spots on a fluorescent screen. A charge coupled device camera records these spots and accumulates the signal for a (shutter opening) period. The signal is then transferred to a frame memory. Subsequently, a personal computer counts the 'events' in the frame memory.
AB - In sputtered neutrals mass spectrometry (SNMS) with a laser for post-ionization a bunch of ions is generated within a short period corresponding to a laser pulse width (typically, a few tens of nanoseconds). The number of ions exceeds 100 under some conditions, so that a peak counting ability close to 1010 is necessary to detect all of them. The authors used an analog detection system for this purpose, but it was found to suffer from signal fluctuation, particularly when the primary ion beam current was low. They therefore developed a new counting system in which a bunch of ions incident on a microchannel plate is converted into photoradiating spots on a fluorescent screen. A charge coupled device camera records these spots and accumulates the signal for a (shutter opening) period. The signal is then transferred to a frame memory. Subsequently, a personal computer counts the 'events' in the frame memory.
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U2 - 10.1016/0042-207x(90)94089-9
DO - 10.1016/0042-207x(90)94089-9
M3 - Conference article
AN - SCOPUS:0025631464
SN - 0042-207X
VL - 41
SP - 1788
EP - 1789
JO - Vacuum
JF - Vacuum
IS - 7 -9 Pt3
T2 - Selected Proceedings of the 11th International Vacuum Congress - (IVC-11) and the 7th International Conference on Solid Surfaces - (ICSS-7)
Y2 - 25 September 1989 through 29 September 1989
ER -