Nitrogen ion implantation into ZrN thin films

Engineering & Materials Science

• Ion implantation 100%
• Thin films 69%
• Nitrogen 68%
• Temperature 29%
• Superconductivity 28%
• Lattice constants 27%
• Superconducting transition temperature 20%
• Structural properties 20%
• X ray diffraction 18%
• Ions 17%
• Experiments 6%

Physics & Astronomy

• nitrogen ions 91%
• ion implantation 67%
• implantation 65%
• thin films 38%
• fluence 24%
• room temperature 16%
• electrical resistivity 9%
• lattice parameters 6%
• superconductivity 6%
• transition temperature 5%
• conduction 4%
• expansion 4%
• diffraction 3%
• ions 3%
• x rays 3%
• energy 2%

Chemical Compounds

• Ion Implantation 90%
• Nitrogen 44%
• Ambient Reaction Temperature 41%
• Superconductive Transition Temperature 27%
• Superconductivity 21%
• Lattice Parameter 17%
• Electrical Property 15%
• X-Ray Diffraction 9%
• Ion 7%