Noncontact ultrasonic imaging of subsurface defects using a laser-ultrasonic technique

Hisashi Yamawaki*, Tetsuya Saito, Hiroaki Fukuhara, Chitoshi Masuda, Yoshihisa Tanaka

*この研究の対応する著者

研究成果: Article査読

6 被引用数 (Scopus)

抄録

Noncontact ultrasonic imaging of subsurface defects using a laser-ultrasonic technique was demonstrated. Pulsed laser irradiation was used for ultrasonic generation, and optical heterodyne interferometry was used for detection of ultrasonic vibration on the specimen surface. Bonded thin plates with character-shaped hallmarks with 1.5mm width on bonding layer were used as specimens. Imagings in ultrasonic transmission and reflection modes were performed, and imagings using not only XY-scanning of specimens but also a laser beam scanner were demonstrated. Ultrasonic images of hallmarks located 0.2mm below the specimen surface were obtained through the experiments.

本文言語English
ページ(範囲)3075-3079
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
35
5 B
出版ステータスPublished - 1996
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)
  • 工学(全般)

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