TY - JOUR
T1 - Novel optical features in Cd+ ion-implanted LEC-grown GaAs
AU - Kawasumi, Yoko
AU - Kimura, Shinji
AU - Iida, Tsutomu
AU - Obara, Akira
AU - Shibata, Hajime
AU - Kobayashi, Naoto
AU - Tsukamoto, Takeyo
AU - Makita, Yunosuke
PY - 1995/12/2
Y1 - 1995/12/2
N2 - High-energy Cd+ ions were implanted into undoped GaAs grown by the liquid encapsulated Czochralski (LEC) method for a wide Cd concentration, [Cd] between 1 × 1016 and 3 × 1021 cm-3. Raman scattering spectra indicate that for [Cd] lower than 1.7 × 1018 cm-3, the damage induced by high-energy ion-implantation can be eliminated by high-temperature annealing. For [Cd] higher than 3 × 1018 cm-3, the intensity of the LO-phonon mode gradually reduces and its width significantly broadens with increasing [Cd]. For [Cd] = 1 × 1021 and 3 × 1021cm-3, a forbidden mode appears on the lower-frequency side of the LO-phonon mode. The results of Rutherford backscattering spectrometry (RBS), and Hall-effect measurements suggest that a solid solution of Cd in GaAs is formed in this high-concentration region. 2 K photoluminescence (PL) spectra indicate that four emissions related with acceptor-acceptor pairs, [g-g], [g-g]2, [g-g]3, and [g-g]β are formed in the near band-edge region even by using LEC-GaAs as a substrate. In the energy region far below the band-edge, many emissions associated with vacancies and complexes with doped Cd atoms are produced specifically for high [Cd].
AB - High-energy Cd+ ions were implanted into undoped GaAs grown by the liquid encapsulated Czochralski (LEC) method for a wide Cd concentration, [Cd] between 1 × 1016 and 3 × 1021 cm-3. Raman scattering spectra indicate that for [Cd] lower than 1.7 × 1018 cm-3, the damage induced by high-energy ion-implantation can be eliminated by high-temperature annealing. For [Cd] higher than 3 × 1018 cm-3, the intensity of the LO-phonon mode gradually reduces and its width significantly broadens with increasing [Cd]. For [Cd] = 1 × 1021 and 3 × 1021cm-3, a forbidden mode appears on the lower-frequency side of the LO-phonon mode. The results of Rutherford backscattering spectrometry (RBS), and Hall-effect measurements suggest that a solid solution of Cd in GaAs is formed in this high-concentration region. 2 K photoluminescence (PL) spectra indicate that four emissions related with acceptor-acceptor pairs, [g-g], [g-g]2, [g-g]3, and [g-g]β are formed in the near band-edge region even by using LEC-GaAs as a substrate. In the energy region far below the band-edge, many emissions associated with vacancies and complexes with doped Cd atoms are produced specifically for high [Cd].
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U2 - 10.1016/0168-583X(95)00754-7
DO - 10.1016/0168-583X(95)00754-7
M3 - Article
AN - SCOPUS:30244520097
SN - 0168-583X
VL - 106
SP - 466
EP - 470
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 1-4
ER -