抄録
We have developed an analytical color fluorescence electron microscope (ACFEM) which is now being studied as a possible tool for evaluating diamonds. The ACFEM permits observation using colors corresponding to cathodoluminescence (CL) wavelengths in the visible region (400-700nm) to distinguish the type, size, and distribution of emission centers and emission bands of diamonds. The ACFEM is an effective tool for determing the conditions used for synthesizing chemical vapor deposition (CVD) diamonds, and is far superior to X-PS and SIMS as a tool for analyzing dopants.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 267-282 |
| ページ数 | 16 |
| ジャーナル | Proceedings of SPIE - The International Society for Optical Engineering |
| 巻 | 1325 |
| 出版ステータス | Published - 1990 12月 1 |
| 外部発表 | はい |
| イベント | Diamond Optics III - San Diego, CA, USA 継続期間: 1990 7月 9 → 1990 7月 11 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- コンピュータ サイエンスの応用
- 応用数学
- 電子工学および電気工学