TY - GEN
T1 - Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips
AU - Shimizu, T.
AU - Nakada, M.
AU - Tsuda, H.
AU - Akedo, J.
AU - Nishi, K.
AU - Ohashi, K.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.
AB - We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.
UR - http://www.scopus.com/inward/record.url?scp=51349156316&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=51349156316&partnerID=8YFLogxK
U2 - 10.1109/ISAF.2007.4393418
DO - 10.1109/ISAF.2007.4393418
M3 - Conference contribution
AN - SCOPUS:51349156316
SN - 1424413338
SN - 9781424413331
T3 - IEEE International Symposium on Applications of Ferroelectrics
SP - 831
EP - 833
BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Y2 - 27 May 2007 through 31 May 2007
ER -