抄録
We report an optical waveguide sensor using ring resonator. A refractive index sensor using resonator with vertical light input will be described. A grating coupler is used to couple the light beam to waveguide and output the light beam. The device has diameter of 40 μm with 500 nm wide waveguide, and fabricated in silicon on insulator (SOI). Experiments show that it has 313 nm/RIU sensitivity and detection limit of 1.5×10-3 RIU for changes in the refractive index of the sample.
本文言語 | English |
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ホスト出版物のタイトル | Technical Digest of the 18th Microoptics Conference, MOC 2013 |
出版ステータス | Published - 2013 |
イベント | 2013 18th Microoptics Conference, MOC 2013 - Tokyo 継続期間: 2013 10月 27 → 2013 10月 30 |
Other
Other | 2013 18th Microoptics Conference, MOC 2013 |
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City | Tokyo |
Period | 13/10/27 → 13/10/30 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料