Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Jing Ji; Hiroshi Oigawa; Hsin Hui Chen; Meng Zhao; Toshitsugu Ueda

doi:10.1541/ieejsms.132.275

Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Jing Ji^*, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

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研究成果: Article › 査読

6 被引用数 (Scopus)

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For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

本文言語	English
ページ（範囲）	275-281
ページ数	7
ジャーナル	IEEJ Transactions on Sensors and Micromachines
巻	132
号	9
DOI	https://doi.org/10.1541/ieejsms.132.275
出版ステータス	Published - 2012

ASJC Scopus subject areas

電子工学および電気工学
機械工学

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10.1541/ieejsms.132.275

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AU - Ji, Jing

AU - Oigawa, Hiroshi

AU - Chen, Hsin Hui

AU - Zhao, Meng

AU - Ueda, Toshitsugu

PY - 2012

Y1 - 2012

N2 - For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

AB - For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

KW - Electrode

KW - Finite element method

KW - Optimization

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Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

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