For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.
|ジャーナル||IEEJ Transactions on Sensors and Micromachines|
|出版ステータス||Published - 2012|
ASJC Scopus subject areas