Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Siim Heinsalu; Yuichi Matsushima; Hiroshi Ishikawa; Katsuyuki Utaka

doi:10.1109/SENSORS47087.2021.9639246

Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Siim Heinsalu, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

基幹理工学部

研究成果: Conference contribution

抄録

In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

本文言語	English
ホスト出版物のタイトル	2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
出版社	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子版）	9781728195018
DOI	https://doi.org/10.1109/SENSORS47087.2021.9639246
出版ステータス	Published - 2021
イベント	20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia 継続期間: 2021 10月 31 → 2021 11月 4

出版物シリーズ

名前	Proceedings of IEEE Sensors
巻	2021-October
ISSN（印刷版）	1930-0395
ISSN（電子版）	2168-9229

Conference

Conference	20th IEEE Sensors, SENSORS 2021
国/地域	Australia
City	Virtual, Online
Period	21/10/31 → 21/11/4

ASJC Scopus subject areas

電子工学および電気工学

文献へのアクセス

10.1109/SENSORS47087.2021.9639246

他のファイルとリンク

引用スタイル

Heinsalu, S., Matsushima, Y., Ishikawa, H., & Utaka, K. (2021). Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. In 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings (Proceedings of IEEE Sensors; Vol. 2021-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS47087.2021.9639246

Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. / Heinsalu, Siim; Matsushima, Yuichi; Ishikawa, Hiroshi その他.
2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

研究成果: Conference contribution

Heinsalu, S, Matsushima, Y, Ishikawa, H & Utaka, K 2021, Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. in 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Proceedings of IEEE Sensors, vol. 2021-October, Institute of Electrical and Electronics Engineers Inc., 20th IEEE Sensors, SENSORS 2021, Virtual, Online, Australia, 21/10/31. https://doi.org/10.1109/SENSORS47087.2021.9639246

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title = "Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity",

abstract = "In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.",

keywords = "Bragg gratings, optical sensors, optimization for high sensitivity",

author = "Siim Heinsalu and Yuichi Matsushima and Hiroshi Ishikawa and Katsuyuki Utaka",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 20th IEEE Sensors, SENSORS 2021 ; Conference date: 31-10-2021 Through 04-11-2021",

year = "2021",

doi = "10.1109/SENSORS47087.2021.9639246",

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AU - Heinsalu, Siim

AU - Matsushima, Yuichi

AU - Ishikawa, Hiroshi

AU - Utaka, Katsuyuki

PY - 2021

Y1 - 2021

N2 - In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

AB - In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

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BT - 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

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Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

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