Piezoelectrically operated optical chopper by quartz micromachining

Hiroshi Toshiyoshi*, Hiroyuki Fujita, Toshitsugu Ueda


    研究成果: Article査読

    27 被引用数 (Scopus)


    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm × 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 μm thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10approx.50 μm wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 μm (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account. We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper. [123]

    ジャーナルJournal of Microelectromechanical Systems
    出版ステータスPublished - 1995 3月

    ASJC Scopus subject areas

    • 電子工学および電気工学
    • 機械工学


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