Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

H. Kudo*, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, S. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake, F. Beppu


研究成果: Conference article査読

1 被引用数 (Scopus)


An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.

ジャーナルSensors and Actuators, A: Physical
出版ステータスPublished - 2004 9月 1
イベントSelected Papers from Transducers 03 - Boston, MA, United States
継続期間: 2003 6月 82003 6月 12

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学


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