TY - JOUR
T1 - Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging
AU - Kudo, H.
AU - Nakamura, T.
AU - Arakawa, T.
AU - Ohtsuka, S.
AU - Izumi, T.
AU - Shoji, S.
AU - Sato, S.
AU - Kobayashi, H.
AU - Mori, K.
AU - Homma, T.
AU - Osaka, T.
AU - Mitsuda, K.
AU - Yamasaki, N. Y.
AU - Fujimoto, R.
AU - Iyomoto, N.
AU - Oshima, T.
AU - Futamoto, K.
AU - Takei, Y.
AU - Ichitsubo, T.
AU - Fujimori, T.
AU - Ishisaki, Y.
AU - Morita, U.
AU - Koga, T.
AU - Sato, K.
AU - Ohashi, T.
AU - Kuroda, Y.
AU - Onishi, M.
AU - Otake, K.
AU - Beppu, F.
N1 - Funding Information:
This work is partly supported by Japan Ministry of Education, Culture, Sports Science & Technology Grant-in-Aid for COE Research and 21st COE of Waseda University, Scientific Research Priority Area (B) no. 13124209, Grant-in-Aid for Encouragement of Young Scientists (B) 13750398 and Japan Society for the Promotion Science Grant-in-Aid for Creative Scientific Research no. 13GS0024. The authors thank for Nanotechnology Support Project of Waseda University for their technical advices. This work is partly supported by Japan Ministry of Education, Culture, Sports Science & Technology Grant-in-Aid for Scientific Research no. 12304009, 13440079, and 14204017.
PY - 2004/9/1
Y1 - 2004/9/1
N2 - An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.
AB - An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.
KW - Calorimeter
KW - Low temperature
KW - Spectrometer
KW - Temperature sensor
KW - X-ray
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U2 - 10.1016/j.sna.2003.11.040
DO - 10.1016/j.sna.2003.11.040
M3 - Conference article
AN - SCOPUS:4344571009
SN - 0924-4247
VL - 114
SP - 171
EP - 175
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 2-3
T2 - Selected Papers from Transducers 03
Y2 - 8 June 2003 through 12 June 2003
ER -