Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo; T. Nakamura; T. Arakawa; S. Ohtsuka; T. Izumi; S. Shoji; H. Sato; H. Kobayashi; K. Mori; T. Homma; T. Osaka; K. Mitsuda; N. Y. Yamasaki; R. Fujimoto; N. Iyomoto; T. Oshima; K. Futamoto; Y. Takei; T. Ichitsubo; T. Fujimori; Y. Ishisaki; U. Morita; T. Koga; K. Sato; T. Ohashi; Y. Kuroda; M. Onishi; K. Otake

doi:10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

研究成果: Conference contribution

抄録

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

本文言語	English
ホスト出版物のタイトル	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	1108-1111
ページ数	4
ISBN（電子版）	0780377311, 9780780377318
DOI	https://doi.org/10.1109/SENSOR.2003.1216963
出版ステータス	Published - 2003
イベント	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States 継続期間: 2003 6月 8 → 2003 6月 12

出版物シリーズ

名前	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
巻	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
国/地域	United States
City	Boston
Period	03/6/8 → 03/6/12

ASJC Scopus subject areas

電子工学および電気工学

文献へのアクセス

10.1109/SENSOR.2003.1216963

他のファイルとリンク

引用スタイル

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., Sato, H., Kobayashi, H., Mori, K., Homma, T., Osaka, T., Mitsuda, K., Yamasaki, N. Y., Fujimoto, R., Iyomoto, N., Oshima, T., Futamoto, K., Takei, Y., Ichitsubo, T., ... Otake, K. (2003). Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1108-1111). [1216963] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter. / Kudo, H.; Nakamura, T.; Arakawa, T. その他.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1108-1111 1216963 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

研究成果: Conference contribution

Kudo, H, Nakamura, T, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Mitsuda, K, Yamasaki, NY, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M & Otake, K 2003, Prototype of the multi-pixel X-ray microcalorimeter. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216963, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1108-1111, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1216963

Kudo H, Nakamura T, Arakawa T, Ohtsuka S, Izumi T, Shoji S その他. Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1108-1111. 1216963. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1216963

Kudo, H. ; Nakamura, T. ; Arakawa, T. その他. / Prototype of the multi-pixel X-ray microcalorimeter. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1108-1111 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{08bac5bbf8fa499fbb32040524c3d75b,

title = "Prototype of the multi-pixel X-ray microcalorimeter",

abstract = "An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.",

keywords = "Bismuth, Energy resolution, Gratings, High-resolution imaging, Optical imaging, Prototypes, Spectroscopy, Testing, Tin, X-ray imaging",

author = "H. Kudo and T. Nakamura and T. Arakawa and S. Ohtsuka and T. Izumi and S. Shoji and H. Sato and H. Kobayashi and K. Mori and T. Homma and T. Osaka and K. Mitsuda and Yamasaki, {N. Y.} and R. Fujimoto and N. Iyomoto and T. Oshima and K. Futamoto and Y. Takei and T. Ichitsubo and T. Fujimori and Y. Ishisaki and U. Morita and T. Koga and K. Sato and T. Ohashi and Y. Kuroda and M. Onishi and K. Otake",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1216963",

language = "English",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1108--1111",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

}

TY - GEN

T1 - Prototype of the multi-pixel X-ray microcalorimeter

AU - Kudo, H.

AU - Nakamura, T.

AU - Arakawa, T.

AU - Ohtsuka, S.

AU - Izumi, T.

AU - Shoji, S.

AU - Sato, H.

AU - Kobayashi, H.

AU - Mori, K.

AU - Homma, T.

AU - Osaka, T.

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Fujimoto, R.

AU - Iyomoto, N.

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Sato, K.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Otake, K.

PY - 2003

Y1 - 2003

N2 - An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

AB - An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

KW - Bismuth

KW - Energy resolution

KW - Gratings

KW - High-resolution imaging

KW - Optical imaging

KW - Prototypes

KW - Spectroscopy

KW - Testing

KW - Tin

KW - X-ray imaging

UR - http://www.scopus.com/inward/record.url?scp=1642584954&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1642584954&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2003.1216963

DO - 10.1109/SENSOR.2003.1216963

M3 - Conference contribution

AN - SCOPUS:1642584954

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1108

EP - 1111

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Prototype of the multi-pixel X-ray microcalorimeter

抄録

出版物シリーズ

Other

ASJC Scopus subject areas

文献へのアクセス

他のファイルとリンク

フィンガープリント

引用スタイル