The Japanese VAMAS‐SCA working group is composed of 19 institutes. Three kinds of Au‐Cu alloys (Au25 at%‐Cu75 at%, Au50 at%‐Cu50 at%, Au75 at%‐Cu25 at%) were prepared, and these specimens were distributed to the members of Japanese VAMAS‐SCA working group and Auger peak amplitude ratios were measured to clarify the correlation factor of different types of spectrometers. The comparison was carried out by using the relative sensitivity factor for Au and Cu. The relative sensitivity factor for lower energy varied from spectrometer to spectrometer, but that for higher energy did not vary so much. Therefore, to carry out the inter‐laboratory comparison of the data, the transfer of the data of peak amplitude at higher energy should be recommended.
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