抄録
A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 5312-5315 |
| ページ数 | 4 |
| ジャーナル | Journal of Applied Physics |
| 巻 | 51 |
| 号 | 10 |
| DOI | |
| 出版ステータス | Published - 1980 10月 |
ASJC Scopus subject areas
- 物理学および天文学（全般）
- 物理学および天文学（その他）