Reduced damage of electron cyclotron resonance etching by In doping into p-GaN

Engineering & Materials Science

• Atoms 57%
• Doping (additives) 61%
• Electrodes 21%
• Electron cyclotron resonance 100%
• Etching 59%

Physics & Astronomy

• atoms 28%
• damage 39%
• electrodes 17%
• electron cyclotron resonance 60%
• etching 41%

Chemical Compounds

• Behavior as Electrode 18%
• Electron Cyclotron Resonance 86%
• Etching 50%
• Surface 11%