TY - GEN
T1 - REDUCING THERMO-ELASTIC DAMPING OF MEMS RESONATORS USING A VIRTUAL SPRING
AU - Tang, Chen
AU - Wu, Zhiheng
AU - Heller, Martin
AU - Nishinohara, Daisuke
AU - Fujita, Toma
AU - Ikehashi, Tamio
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - We report on a MEMS resonator that can reduce thermo-elastic damping (TED) and increase the quality factor beyond the conventional TED limit. The TED reduction is attained by a virtual spring, which is a spring-like actuator enabled by electrostatic actuators. In the virtual spring, the restoring force is realized by applying position-dependent voltages to the actuator. In contrast to mechanical springs, the actuator shape is unchanged during the actuation. This enables to reduce the stress and hence the TED. We show by simulations that the quality factor can be increased by a factor of 30, compared to a reference mechanical resonator with the same resonance frequency. We also report on the structure dependence of the virtual spring quality factors.
AB - We report on a MEMS resonator that can reduce thermo-elastic damping (TED) and increase the quality factor beyond the conventional TED limit. The TED reduction is attained by a virtual spring, which is a spring-like actuator enabled by electrostatic actuators. In the virtual spring, the restoring force is realized by applying position-dependent voltages to the actuator. In contrast to mechanical springs, the actuator shape is unchanged during the actuation. This enables to reduce the stress and hence the TED. We show by simulations that the quality factor can be increased by a factor of 30, compared to a reference mechanical resonator with the same resonance frequency. We also report on the structure dependence of the virtual spring quality factors.
KW - quality factor
KW - resonator
KW - Thermo-elastic Damping (TED)
UR - http://www.scopus.com/inward/record.url?scp=85159072277&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85159072277&partnerID=8YFLogxK
U2 - 10.1109/INERTIAL56358.2023.10103974
DO - 10.1109/INERTIAL56358.2023.10103974
M3 - Conference contribution
AN - SCOPUS:85159072277
T3 - INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023
Y2 - 28 March 2023 through 31 March 2023
ER -