TY - GEN
T1 - ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency
AU - Masamune, Chiaki
AU - Karasawal, Rei
AU - Yanagitani, Takahiko
N1 - Funding Information:
This work was supported by the Japan Science and Technology Agency, PRESTO (JST PRESTO, No. JPMJPR16R8) and KAKENHI (Grant-in-Aid for Scientific Research (B), No. 16H04356).
Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/17
Y1 - 2018/12/17
N2 - Ultrasonic transducer is used for biological imaging. High frequency ultrasound has high spatial resolution. Higher frequency, however, induces lower deep resolution because of the large sound attenuation. The electromechanical coupling coefficient kt2 of generally used PVDF (Polyvinylidene Difluoride) is not enough for practical applications. We previously reported the transducer with ScAlN thick film on silica glass rod, operating at 44 MHz (kt2=11.9%) [1]. Lead-free ScAlN with large piezoelectricity is suitable for medical applications. In this study, we report for the first time the fabrication of ScAlN free-standing plates with 0.105 mm and 0.117 mm thickness by using hot target sputtering growth.
AB - Ultrasonic transducer is used for biological imaging. High frequency ultrasound has high spatial resolution. Higher frequency, however, induces lower deep resolution because of the large sound attenuation. The electromechanical coupling coefficient kt2 of generally used PVDF (Polyvinylidene Difluoride) is not enough for practical applications. We previously reported the transducer with ScAlN thick film on silica glass rod, operating at 44 MHz (kt2=11.9%) [1]. Lead-free ScAlN with large piezoelectricity is suitable for medical applications. In this study, we report for the first time the fabrication of ScAlN free-standing plates with 0.105 mm and 0.117 mm thickness by using hot target sputtering growth.
KW - ScAlN
KW - free-standing plate
KW - pieozoelectric plate
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U2 - 10.1109/ULTSYM.2018.8579797
DO - 10.1109/ULTSYM.2018.8579797
M3 - Conference contribution
AN - SCOPUS:85060608503
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018
PB - IEEE Computer Society
T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018
Y2 - 22 October 2018 through 25 October 2018
ER -