ScAlN nano-rods structure thin film grown by a self-shadowing oblique sputtering for high electromechanical coupling transducer applications

Physics & Astronomy

• self shadowing 100%
• rods 48%
• transducers 48%
• sputtering 46%
• thin films 30%
• polymers 14%
• thin plates 9%
• crystals 8%
• magnetron sputtering 7%
• substitutes 6%
• crystallization 6%
• composite materials 5%