Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu; Anna Kawano; Yuji Isogai; Yuichi Matsushima; Hiroshi Ishikawa; Katsuyuki Utaka

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

基幹理工学部

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

本文言語	English
ホスト出版物のタイトル	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings
出版社	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子版）	9781943580866
出版ステータス	Published - 2021 6月
イベント	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - San Francisco, United States 継続期間: 2021 6月 6 → 2021 6月 11

出版物シリーズ

名前	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings

Conference

Conference	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021
国/地域	United States
City	San Francisco
Period	21/6/6 → 21/6/11

ASJC Scopus subject areas

人工知能
コンピュータネットワークおよび通信
ハードウェアとアーキテクチャ
信号処理
電子材料、光学材料、および磁性材料
器械工学
原子分子物理学および光学

他のファイルとリンク

フィンガープリント

「Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

Heinsalu, S., Kawano, A., Isogai, Y., Matsushima, Y., Ishikawa, H., & Utaka, K. (2021). Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. In 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings Article 9489640 (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings). Institute of Electrical and Electronics Engineers Inc..

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. / Heinsalu, Siim; Kawano, Anna; Isogai, Yuji その他.
2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. 9489640 (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

研究成果: Conference contribution

Heinsalu, S, Kawano, A, Isogai, Y, Matsushima, Y, Ishikawa, H & Utaka, K 2021, Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. in 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings., 9489640, 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021, San Francisco, United States, 21/6/6.

Heinsalu S, Kawano A, Isogai Y, Matsushima Y, Ishikawa H , Utaka K. Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. In 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2021. 9489640. (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

Heinsalu, Siim ; Kawano, Anna ; Isogai, Yuji その他. / Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

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abstract = "Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.",

author = "Siim Heinsalu and Anna Kawano and Yuji Isogai and Yuichi Matsushima and Hiroshi Ishikawa and Katsuyuki Utaka",

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AU - Kawano, Anna

AU - Isogai, Yuji

AU - Matsushima, Yuichi

AU - Ishikawa, Hiroshi

AU - Utaka, Katsuyuki

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