TY - JOUR
T1 - Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)
AU - Kono, S.
AU - Sasaki, T.
AU - Inaba, M.
AU - Hiraiwa, A.
AU - Kawarada, H.
N1 - Funding Information:
The present work is partly supported by a Grant-in-Aid for Scientific Research (S) (Grant Number 26220903), Grant-in-Aid for Scientific Research (A) (Grant Number 26246001), and Grant-in-Aid for Scientific Research (B) (Grant Number 15H03980) from the Japan Society for the Promotion of Science (JSPS).
Publisher Copyright:
© 2017 Elsevier B.V.
PY - 2017/11
Y1 - 2017/11
N2 - The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.
AB - The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.
KW - Chemical vaper deposition
KW - Current-voltage measurement
KW - Gold ohmic contact
KW - Hydrogen-terminated diamond
KW - Sheet resistance
KW - Surface conductive layer
UR - http://www.scopus.com/inward/record.url?scp=85032036782&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85032036782&partnerID=8YFLogxK
U2 - 10.1016/j.diamond.2017.09.020
DO - 10.1016/j.diamond.2017.09.020
M3 - Article
AN - SCOPUS:85032036782
SN - 0925-9635
VL - 80
SP - 93
EP - 98
JO - Diamond and Related Materials
JF - Diamond and Related Materials
ER -