TY - GEN
T1 - Si nano-photodiode with a surface-plasmon antenna for sion waveguide-integrated structure
AU - Fujikata, Junichi
AU - Ushida, Jun
AU - Okamoto, Daisuke
AU - Gomyo, Akiko
AU - Nishi, Kenichi
AU - Tsuchizawa, Tai
AU - Watanabe, Toshifumi
AU - Yamada, Koji
AU - Itabashi, Seiichi
AU - Ohashi, Keishi
PY - 2007
Y1 - 2007
N2 - We developed a Si nano-photodiode with a surface plasmon (SP) antenna for a SiON waveguide-integrated structure. We showed that interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer.
AB - We developed a Si nano-photodiode with a surface plasmon (SP) antenna for a SiON waveguide-integrated structure. We showed that interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer.
UR - http://www.scopus.com/inward/record.url?scp=51249087311&partnerID=8YFLogxK
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U2 - 10.1109/LEOS.2007.4382715
DO - 10.1109/LEOS.2007.4382715
M3 - Conference contribution
AN - SCOPUS:51249087311
SN - 142440925X
SN - 9781424409259
T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
SP - 929
EP - 930
BT - LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
T2 - 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
Y2 - 21 October 2007 through 25 October 2007
ER -