Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

Takanobu Watanabe

doi:10.1109/IMFEDK.2017.7998023

Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

Takanobu Watanabe^*

^*この研究の対応する著者

基幹理工学部

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

Energy harvester is a key device for realizing trillion sensors network society. Thermoelectric generator (TEG) is regarded as the ultimate energy harvester to provide semipermanent power from heat energies via Seebeck effect. The recent discovery of the superior thermoelectric (TE) property of silicon nanowires (Si-NWs) opens the way for Si-based TEGs. In this paper, a very simple device architecture of Si-based micro TEG is proposed. It can be fabricated by the CMOS-compatible process, and the TE power density is found to be scalable by miniaturizing and integrating the structure.

本文言語	English
ホスト出版物のタイトル	IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	22-23
ページ数	2
ISBN（電子版）	9781509039913
DOI	https://doi.org/10.1109/IMFEDK.2017.7998023
出版ステータス	Published - 2017 7月 31
イベント	15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017 - Kyoto, Japan 継続期間: 2017 6月 29 → 2017 6月 30

出版物シリーズ

名前	IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai

Other

Other	15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017
国/地域	Japan
City	Kyoto
Period	17/6/29 → 17/6/30

ASJC Scopus subject areas

電子工学および電気工学
電子材料、光学材料、および磁性材料
表面、皮膜および薄膜

文献へのアクセス

10.1109/IMFEDK.2017.7998023

他のファイルとリンク

引用スタイル

Watanabe, T. (2017). Silicon-based micro thermoelectric generator fabricated by CMOS compatible process. In IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai (pp. 22-23). Article 7998023 (IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMFEDK.2017.7998023

Silicon-based micro thermoelectric generator fabricated by CMOS compatible process. / Watanabe, Takanobu.
IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai. Institute of Electrical and Electronics Engineers Inc., 2017. p. 22-23 7998023 (IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai).

研究成果: Conference contribution

Watanabe, T 2017, Silicon-based micro thermoelectric generator fabricated by CMOS compatible process. in IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai., 7998023, IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, Institute of Electrical and Electronics Engineers Inc., pp. 22-23, 15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017, Kyoto, Japan, 17/6/29. https://doi.org/10.1109/IMFEDK.2017.7998023

Watanabe T. Silicon-based micro thermoelectric generator fabricated by CMOS compatible process. In IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai. Institute of Electrical and Electronics Engineers Inc. 2017. p. 22-23. 7998023. (IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai). doi: 10.1109/IMFEDK.2017.7998023

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abstract = "Energy harvester is a key device for realizing trillion sensors network society. Thermoelectric generator (TEG) is regarded as the ultimate energy harvester to provide semipermanent power from heat energies via Seebeck effect. The recent discovery of the superior thermoelectric (TE) property of silicon nanowires (Si-NWs) opens the way for Si-based TEGs. In this paper, a very simple device architecture of Si-based micro TEG is proposed. It can be fabricated by the CMOS-compatible process, and the TE power density is found to be scalable by miniaturizing and integrating the structure.",

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Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

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出版物シリーズ

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ASJC Scopus subject areas

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