A silicon bulk micromachined accelerometer structure has been fabricated and characterized, that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear and up to two axes of angular acceleration can be measured. This combination has practical relevance for single-point sensing of the complete motion of e.g. a car body with a minimum number of sensors in applications like vehicle dynamic control or crash detection.
|Published - 1997
|Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
継続期間: 1997 6月 16 → 1997 6月 19
|Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
|Chicago, IL, USA
|97/6/16 → 97/6/19
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