TY - JOUR
T1 - Simulation of electron/solid interaction and application to quantitative analysis by electron spectroscopies
AU - Ichimura, S.
AU - Ding, Ze Jung
AU - Shimizu, R.
PY - 1988/7/1
Y1 - 1988/7/1
N2 - The intensity of the measured spectrum, especially the Auger spectrum, is strongly affected by the contribution of backscattered electrons with high energy, since those energetic electrons can also excite Auger electrons at the surface. The aim of the present paper is to describe briefly how the energy distribution of backscattered electrons can be estimated and how the result can be applied for the quantitative analysis by electron spectroscopies, especially by AES.
AB - The intensity of the measured spectrum, especially the Auger spectrum, is strongly affected by the contribution of backscattered electrons with high energy, since those energetic electrons can also excite Auger electrons at the surface. The aim of the present paper is to describe briefly how the energy distribution of backscattered electrons can be estimated and how the result can be applied for the quantitative analysis by electron spectroscopies, especially by AES.
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M3 - Conference article
AN - SCOPUS:0024037622
SN - 0142-2421
VL - 12
JO - Surface and Interface Analysis
JF - Surface and Interface Analysis
IS - 1-12
T2 - Proceedings of the European Conference on Applications of Surface and Interface Analysis, ECASIA 87
Y2 - 19 October 1987 through 23 October 1987
ER -