@inproceedings{58b9f1548fdc4827b4affd4efe47a5bc,
title = "Smallest dead volume microvalves for integrated chemical analyzing systems",
abstract = "Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 μl/min to tens of μl/min. These valves are useful for constructing integrated chemical analyzing systems.",
author = "Shuichi Shoji and {Van der Schoot}, Bart and {de Rooij}, Nico and Masayoshi Esashi",
year = "1991",
month = dec,
day = "1",
language = "English",
isbn = "0879425857",
series = "Transducers '91",
publisher = "Publ by IEEE",
pages = "1052--1055",
booktitle = "Transducers '91",
note = "1991 International Conference on Solid-State Sensors and Actuators ; Conference date: 24-06-1991 Through 28-06-1991",
}