@inproceedings{a2ebb561b6454b6fadb7866d2b4c7514,
title = "Spatial variability in large area single and few-layer CVD graphene",
abstract = "Variability in graphene can result from the material synthesis or post-processing steps as well as the surrounding environment. This is a critical issue for the performance of large area devices as well as for the large-scale production of micro- and nano-scale graphene devices, leading to low yield and reliability. The aim of this study is to investigate variability of single and few-layer graphene structures, on different substrates, and the effects it has on its electronic properties. We demonstrate a combination of Kelvin probe force microscopy (KPFM) and non-contact Fourier transform infrared spectroscopy (FTIR) measurements for centimeter-scale quantitative mapping of the electrical variability of large-area chemical vapor deposited graphene films. KPFM provides statistical insight into the influence of micro-scale defects on the surface potential, while FTIR gives the spatially averaged chemical potential of the graphene structures. Test structures consisting of single-, bi- and few-layer graphene on S{\`I}O2 and AI2O3 were fabricated and analyzed.",
keywords = "CVD, FTIR, Fermi level, KPFM, bilayer, graphene, large-scale devices, multilayer, substrate, variability",
author = "Moldovan, {Clara F.} and Krzysztof Gajewski and Michele Tamagnone and Weatherup, {Robert S.} and Hisashi Sugime and Anna Szumska and Vitale, {Wolfgang A.} and John Robertson and Ionescu, {Adrian M.}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2015 ; Conference date: 26-01-2015 Through 28-01-2015",
year = "2015",
month = mar,
day = "18",
doi = "10.1109/ULIS.2015.7063779",
language = "English",
series = "EUROSOI-ULIS 2015 - 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "85--88",
booktitle = "EUROSOI-ULIS 2015 - 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon",
}