Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

H. Shinohara; T. Suzuki; J. Mizuno; S. Shoji

doi:10.1109/SENSOR.2009.5285966

Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

H. Shinohara^*, T. Suzuki, J. Mizuno, S. Shoji

^*この研究の対応する著者

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O₃ were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.

本文言語	English
ホスト出版物のタイトル	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ	1039-1042
ページ数	4
DOI	https://doi.org/10.1109/SENSOR.2009.5285966
出版ステータス	Published - 2009 12月 11
イベント	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States 継続期間: 2009 6月 21 → 2009 6月 25

出版物シリーズ

名前	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
国/地域	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/SENSOR.2009.5285966

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引用スタイル

Shinohara, H., Suzuki, T., Mizuno, J., & Shoji, S. (2009). Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1039-1042). 記事 5285966 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285966

Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. / Shinohara, H.; Suzuki, T.; Mizuno, J. その他.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1039-1042 5285966 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: Conference contribution

Shinohara, H, Suzuki, T, Mizuno, J & Shoji, S 2009, Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285966, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1039-1042, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285966

Shinohara H, Suzuki T, Mizuno J, Shoji S. Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1039-1042. 5285966. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285966

Shinohara, H. ; Suzuki, T. ; Mizuno, J. その他. / Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 1039-1042 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

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title = "Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer",

abstract = "To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.",

keywords = "Cyclo-olefin polymer, Direct bonding, Oxygen plasma, Vacuum ultraviolet light",

author = "H. Shinohara and T. Suzuki and J. Mizuno and S. Shoji",

year = "2009",

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doi = "10.1109/SENSOR.2009.5285966",

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AU - Shinohara, H.

AU - Suzuki, T.

AU - Mizuno, J.

AU - Shoji, S.

PY - 2009/12/11

Y1 - 2009/12/11

N2 - To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.

AB - To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.

KW - Cyclo-olefin polymer

KW - Direct bonding

KW - Oxygen plasma

KW - Vacuum ultraviolet light

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Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

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