Studies on low-temperature direct bonding of VUV/O3-, VUV- and O2 plasma-pre-treated poly-methylmethacrylate

Hidetoshi Shinohara*, Takashi Kasahara, Shuichi Shoji, Jun Mizuno


研究成果: Article査読

45 被引用数 (Scopus)


Low-temperature direct bonding of poly-methylmethacrylate (PMMA) plates was achieved by pre-treatment with vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O3), with vacuum ultraviolet irradiation in a nitrogen atmosphere (VUV), or with oxygen plasma. Based on surface analysis by attenuated total reflection Fourier-transform infrared spectrometry (ATR-FT-IR), x-ray photoelectron spectroscopy and near edge x-ray absorption fine structure spectroscopy, chemical changes of the PMMA surface after the pre-treatment were investigated. Changes in morphology and softening point were also investigated by nano-thermal analysis and atomic force microscopy. From the results, the bonding mechanisms proposed are described as follows: during the bonding process, the increased or generated polar groups cause an increase in the dipolar interactions (such as hydrogen bonding) between two pre-treated PMMA surfaces; in the case of VUV/O3 or VUV pre-treatment, a low-T g layer is generated on the surface and this layer acts as an adhesive for the direct bonding of layers by diffusion.

ジャーナルJournal of Micromechanics and Microengineering
出版ステータスPublished - 2011

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学


「Studies on low-temperature direct bonding of VUV/O3-, VUV- and O2 plasma-pre-treated poly-methylmethacrylate」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。