SUBMICRON LITHOGRAPHY USING FOCUSED-ION-BEAM EXPOSURE FOLLOWED BY A DRY DEVELOPMENT.
T. Kato*, H. Morimoto, K. Tsukamoto, H. Shinohara, M. Inuishi
*この研究の対応する著者
研究成果: Conference contribution
T. Kato*, H. Morimoto, K. Tsukamoto, H. Shinohara, M. Inuishi
研究成果: Conference contribution