TY - JOUR
T1 - Substitution and electrical activation of carbon in C- and C + P-implanted InP
AU - Kushida, K.
AU - Ogawa, O.
AU - Kuriyama, K.
AU - Hayashi, N.
AU - Ogura, M.
AU - Hasegawa, M.
AU - Kobayashi, Naoto
PY - 2002/5
Y1 - 2002/5
N2 - Substitution and electrical activation of carbon in 12C+- and 12C++31P+-implanted InP were studied for various annealing stages (773-923 K for 20 min). 12C+ was implanted into semi-insulating InP at a range of ∼3.0 μm with a total dose of 3 × 1014 cm-2. The co-implantation of 12C+ and 31P+ was performed at a range of ∼2.0 μm with an individual dose of 3 × 1014 cm-2. Rutherford back scattering, X-ray diffraction and Raman spectroscopy measurements showed the improvement of the crystallinity in the InP matrix by the annealing, indicating the disappearance of the introduced vacancy-interstitial pairs. Those were introduced during ion irradiation. All the annealed samples showed the n-type conduction by a van der Pauw method. The electric activation rate in the 12C+ implanted samples reached to 4.5% for those annealed at 923 K. For the co-implanted samples, the rate was slightly improved (∼7.3%). Nuclear reaction analyses for the 12C+-implanted samples using a 12C(d,p)13C reaction showed a tendency that carbon is easily incorporated into the interstitial lattice sites.
AB - Substitution and electrical activation of carbon in 12C+- and 12C++31P+-implanted InP were studied for various annealing stages (773-923 K for 20 min). 12C+ was implanted into semi-insulating InP at a range of ∼3.0 μm with a total dose of 3 × 1014 cm-2. The co-implantation of 12C+ and 31P+ was performed at a range of ∼2.0 μm with an individual dose of 3 × 1014 cm-2. Rutherford back scattering, X-ray diffraction and Raman spectroscopy measurements showed the improvement of the crystallinity in the InP matrix by the annealing, indicating the disappearance of the introduced vacancy-interstitial pairs. Those were introduced during ion irradiation. All the annealed samples showed the n-type conduction by a van der Pauw method. The electric activation rate in the 12C+ implanted samples reached to 4.5% for those annealed at 923 K. For the co-implanted samples, the rate was slightly improved (∼7.3%). Nuclear reaction analyses for the 12C+-implanted samples using a 12C(d,p)13C reaction showed a tendency that carbon is easily incorporated into the interstitial lattice sites.
KW - C and P co-implantation
KW - Electrical activation
KW - InP
KW - Nuclear reaction analysis
KW - Rutherford back scattering spectroscopy
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U2 - 10.1016/S0168-583X(01)01232-0
DO - 10.1016/S0168-583X(01)01232-0
M3 - Article
AN - SCOPUS:0036569383
SN - 0168-583X
VL - 190
SP - 869
EP - 872
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
ER -