Super high rate thermal plasma CVD of ceramics

Hideyuki Murakami^*, Hifumi Nagai, Tohru Irokawa, Toyonobu Yoshida, Kazuo Akashi

^*この研究の対応する著者

研究成果: Article › 査読

11 被引用数 (Scopus)

本文言語	English
ページ（範囲）	49-55
ページ数	7
ジャーナル	Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
巻	97
号	1
DOI	https://doi.org/10.2109/jcersj.97.49
出版ステータス	Published - 1989
外部発表	はい

ASJC Scopus subject areas

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AU - Yoshida, Toyonobu

AU - Akashi, Kazuo

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