An anatase TiO2 film was epitaxially grown on a conductive Nb-doped single crystalline SrTiO3 substrate. RuO2 Schottky electrode was fabricated on the epitaxial anatase film. The dark current-voltage and capacitance-voltage characteristics for the RuO 2/anatase junction were plotted. The junction enabled deep level transient spectroscopy in the high-temperature region.
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