TY - JOUR
T1 - Surface characterization of smooth heteroepitaxial diamond layers on β-SiC (001)
AU - Mizuochi, Y.
AU - Nagasawa, H.
AU - Kawarada, H.
N1 - Funding Information:
This work has been supported in part by the Grant-in-aid for General Scientific Research (07650384) from the Ministry of Education, Science and Culture of Japan.
PY - 1997/3
Y1 - 1997/3
N2 - Surface morphology of continuous heteroepitaxial diamond layers on β-SiC (001) has been characterized by various methods. From surface normal SEM images, the surface was so smooth that crystal boundaries were not clearly observed, but in AFM and Normarski optical microscope images, shallow gaps supposed to be remnant boundaries and wrinkles on the surfaces were observed. On the other hand, isolated (001) surfaces before coalescence had no wrinkles and were smoother than the surface of continuous heteroepitaxial films. The wrinkles observed only on the continuous heteroepitaxial film are considered to be formed by strain caused by coalescence, and raise the new problem of heteroepitaxy when the degree of orientation is improved.
AB - Surface morphology of continuous heteroepitaxial diamond layers on β-SiC (001) has been characterized by various methods. From surface normal SEM images, the surface was so smooth that crystal boundaries were not clearly observed, but in AFM and Normarski optical microscope images, shallow gaps supposed to be remnant boundaries and wrinkles on the surfaces were observed. On the other hand, isolated (001) surfaces before coalescence had no wrinkles and were smoother than the surface of continuous heteroepitaxial films. The wrinkles observed only on the continuous heteroepitaxial film are considered to be formed by strain caused by coalescence, and raise the new problem of heteroepitaxy when the degree of orientation is improved.
KW - Atomic force microscopy
KW - Crystal growth
KW - Heteroepitaxy
KW - Surface
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U2 - 10.1016/s0925-9635(96)00710-8
DO - 10.1016/s0925-9635(96)00710-8
M3 - Article
AN - SCOPUS:0000073778
SN - 0925-9635
VL - 6
SP - 277
EP - 281
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 2-4
ER -