Surface Modification of a Liquid Crystalline Polymer Film Using 172 nm Vacuum Ultraviolet Light for Fabricating Copper Finepattern

Engineering & Materials Science

• Liquid crystal polymers 100%
• Polymer films 90%
• Surface treatment 72%
• Vacuum 60%
• Palladium 60%
• Copper 55%
• X ray photoelectron spectroscopy 27%
• Ions 21%
• Atomic force microscopy 14%
• Formaldehyde 14%
• Chemical vapor deposition 13%
• Topography 12%
• Plating 12%
• Contact angle 12%
• Wetting 11%
• Catalysts 9%
• Oxygen 9%
• Chemical analysis 7%
• Water 6%